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MEMS technology is advancing rapidly, and over the last five years has allowed the construction of many integrated systems, including (for example) novel micro- and nano-structured materials, sensors based on movable mechanical components, and self powered autonomous devices. Many involve nanotechnology. These components are allowing systems that were once confined to the laboratory to find new applications with a strong commercial potential. UK activity is now rapidly increasing, after a relatively slow start compared to the rest of the advanced industrial nations.

The aim of this event is to bring together UK expertise in MEMS, to introduce the advantage of MEMS process technology, and to highlight developments. The topics should be relevant to companies engaged in sensor manufacture and process control, equipment manufacturers for the semiconductor industry, and academics engaged in MEMS, nanotechnology and sensor research.

Contributed papers are invited on all aspects of MEMS, including design, fabrication, test, system on a chip, manufacturing and commercialisation, and applications for sensors and actuators in all physical and chemical domains.

Invited talks will be given on key topics including historical developments, laser machining, microfluidics and bio-MEMS.




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